YIXING NORKE

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NORKE

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Céramiques semi-conductrices

Review ceramic components for semiconductor equipment by installation position and function. A support or insulator outside the process area has different requirements from a part exposed directly to process conditions.

Define the equipment and acceptance requirements
  • Component function. Describe the installation position, mating parts and whether the component supports, locates or electrically separates an assembly.
  • Process exposure. State the applicable temperature, vacuum or contact media and any cleanliness requirements. Suitability needs review for those conditions.
  • Drawing and acceptance. Supply the material specification, critical interfaces, surface requirements, quantity and the requested inspection or validation criteria.

Discuss an equipment component drawing