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NORKE
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Cerámica semiconductora
Review ceramic components for semiconductor equipment by installation position and function. A support or insulator outside the process area has different requirements from a part exposed directly to process conditions.
Define the equipment and acceptance requirements
- Component function. Describe the installation position, mating parts and whether the component supports, locates or electrically separates an assembly.
- Process exposure. State the applicable temperature, vacuum or contact media and any cleanliness requirements. Suitability needs review for those conditions.
- Drawing and acceptance. Supply the material specification, critical interfaces, surface requirements, quantity and the requested inspection or validation criteria.
